大型放射光施設 SPring-8

Language：English

Speaker：Dr. Cedric Corley-Wiciak

Affiliation：European Synchrotron Radiation Facility

Title：Spatiotemporal Imaging of Lattice Strain in Microelectronic Devices at Beamline ID01/ESRF

Abstract：
C. Corley-Wiciak^1,*, A.A. Corley-Wiciak ¹, N.T. Sammler², L. Seidler³, B. Butej², L. Neumann⁴,
J. Tiscareño‐Ramírez⁵, P.A. Douissard¹, S. J. Leake¹, P. Boesecke¹, D. Buca⁵, B. Witzigmann⁶,
M. Reisinger ², G. Capellini ^7,8, T.U. Schulli¹

1 ESRF - European Synchrotron Radiation Facility, 38043 Grenoble, France
2 KAI GmbH, 9524, Villach, Austria
3 Institute of Semiconductor Engineering, University of Stuttgart, 70569 Stuttgart, Germany
4 IKTS Fraunhofer, 01277 Dresden, Deutschland
5 Peter Grünberg Institute 9 (PGI 9) and JARA‐Fundamentals of Future Information Technologies, Forschungszentrum Jülich, 52425 Jülich, Germany
6 Lehrstuhl für Optoelektronik, Department EEI, Friedrich‐Alexander‐Universität, 91052 Erlangen‐Nürnberg, Germany
7 IHP – Leibniz‐Institut für innovative Mikroelektronik, 15236 Frankfurt(Oder), Germany
8 Dipartimento di Scienze, Universita Roma Tre, 00146 Roma, Italy

Static nanoscale mapping of lattice strain by synchrotron-based diffraction microscopy has been demonstrated with great success on many examples in the last decade [1,2]. Nowadays, the advent of high brightness synchrotron sources has sped up the acquisition of diffraction data from microscopic volumes [3] This improvement enables to advance from recording static images towards stroboscopic movies of strain in devices under operation [4], similar to the transition from stationary photography to moving film in the early 20th century. We demonstrate how this capability has been exploited at beamline ID01/ESRF [5], on several prominent examples from the field of microelectronics, visualizing localized heating in a GeSn/Ge-based µ-disk laser and the piezoelectric strain field during hard switching in a GaN/Si High Electron Mobility Transistor.

[1] C. Corley-Wiciak, et al. Small Methods. 8(12), 2400598, 2024
[2] E. Zatterin, et al. Physica Status Solidi (RRL) – Rapid Research Letters. 19(1), 2400241, 2025
[3] P. Cloetens, et al. Synchrotron Radiation News, 1-6, 2025
[4] T. Zhou, et al. Nature Communications. 16(1), 2822, 2025.
[5] S. J. Leake, et al. Journal of Synchrotron Radiation. 26(2), 571–584, 2019.