BL15XU laminography
問い合わせ番号
INS-0000001659
High energy laminography
Laminography equipment has been installed in the experimental hutch 1. A thick planar sample is mounted on a rotation stage. The sample rotation axis is tilted by 30° with swivel stages, where the sample rotation axis is normal to the X-ray beam when the tilt angle is 0°. X-ray transmission images are recorded using indirect lens-coupled visible-light conversion-type X-ray imaging detectors with diffusion-free transparent scintillators[1]. The detectors located at about 100 mm and 200 mm from the sample are switched for 3D imaging with high resolution (HR) and large field of view (LFOV), respectively.
[1] T. Kameshima et al., Opt. Lett. 44, 1403 (2019)
X-ray detectors
The scintillators are 5-µm- and 15-µm-thick LuAG:Ce ceramics for HR and LFOV imaging, respectively. The thin scintillators are directly attached on transparent 1-mm-thick non-doped LuAG ceramics[1]. Fluorescence images on the scintillators are transferred through Al mirrors, objective lenses with magnifications of 20x and 5x for HR and LFOV imaging, and tube lenses to CMOS image sensors with a pixel size of 5.48 x 5.48 µm and a resolution of 2,660 x 2,300. Then, an effective pixel size and FOV are 0.274 x 0.274 µm and 712.4 x 630.2 µm for HR imaging. Although FOV is limited by the X-ray beam size, an effective pixel size and FOV of the detector itself are 1.096 x 1.096 µm and 2,915 x 2,521 µm for LFOV imaging.
Measurement and reconstruction
X-ray transmission images are automatically acquired by 3,600 images for a 360° sample rotation. Acquired images are transferred to a computer with GPU. A reconstruction result of a single layer for a trial can be obtained in about 10 min. After that, 3D reconstruction can be conducted in a few tens of minutes.
CONTACT INFORMATION
Please note that each e-mail address is followed by "@spring8.or.jp."
Yujiro HAYASHI
RIKEN SPring-8 center
1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148
Phone : +81-(0)791-58-0802 ex.9671
e-mail : hayashi.y