BL16B2 High-throughput X-ray topography system
問い合わせ番号
INS-0000001668
The high-throughput X-ray topography system consists of a diffractometer with a sample stage designed for 300 mm diameter wafers and an XY stage providing ±100 mm in-plane wafer scanning, and digital X-ray cameras. The system is compatible with both a reflection and transmission geometry. Automatic acquisition of X-ray topographs using a digital X-ray camera while scanning the sample enables high-resolution observation over a wide area.
This system can provide X-ray topographs with image quality comparable to those obtained using conventional X-ray film or nuclear emulsion plate, without chemical development and with quantitative X-ray intensity.
Fig1. High-throughput X-ray topography system. Schematic and table of motorized stages.
Table1. DIFRAS detectors.
| Type | Pixel size [µm /pixel] | Field of view [mm] | Magnification | Scintillator | Camera | |
|---|---|---|---|---|---|---|
| DIFRAS detector 1 | High-resolution | 0.72 | 10.0 × 7.7 | 5.2 | LuAG:Ce(15 µm)/LuAG(1 mm) | SONY IMX411 14,192 × 10,640 3.76 µm /pixel |
| DIFRAS detector 2 | Wide-field | 3.8 | 53 × 40 | 1.0 | LuAG:Ce(250 µm) |