BL16XU OUTLINE

問い合わせ番号

INS-0000000390

ABSTRACT

This beamline, together with its sister beamline BL16B2, is designed by an industrial consortium of 13 companies to characterize various materials developed for industrial purpose.
The main experiments are fluorescence X-ray analysis of trace elements on Si wafer surfaces, X-ray diffraction experiments on thin films with nanometer-scale thickness, microscopic observation of materials and micro-fabricated devices by using X-ray microbeams with spot sizes of 1 µm or less, and X-ray magnetic circular dichroism spectroscopy on magnetic devices and materials.

AREA OF RESEARCH

Characterization of thin films for ULSI, optical and magnetic devices, secondary batteries, fuel cells, catalysts, functional materials, and structural materials.

KEYWORDS

Scientific field
Fluorescence X-ray analysis with total-reflection X-ray fluorescence (TXRF) and with standard XRF, X-ray diffraction experiments of thin films in out-of-plane and in-plane configurations, X-ray reflectivity measurement, Grazing-incidence X-ray scattering (GIXS), Micro analysis and Scanning X-ray microscopy by using X-ray microbeams, X-ray magnetic circular dichroism (XMCD) spectroscopy and magnetic hysteresis measurement.
Equipment
Fluorescence X-ray analysis system, X-ray diffraction system, Microbeam experiment system, XMCD experiment system.

SOURCE AND OPTICS

X-rays at sample

Energy range	4.5 ∼ 40 keV
Energy resolution	ΔE/E ∼ 10^-4
Photon flux	normal ∼ 10¹² photons/s focusing ∼ 10¹⁰ photons/s
Beam Size	normal < 1(H) × 1(V) focusing < 1 μm(H)×1 μm(V)

Schematic View of Beamline

Photograph of beamline BL16XU and BL16B2

EXPERIMENTAL STATIONS

Apparatuses for diffraction, fluorescence analysis, and microbeam experiments are installed in tandem. XMCD spectroscopy can be performed at both diffraction and microbeam stations.

Fluorescence X-ray analysis system (fig.1)
- Sample chamber evacuated to 10 Pa or filled with He-gas at normal pressure
- Wavelength-dispersive detector (analyzer crystals), energy-dispersive detectors (SDD, SSD)
  
  fig.1. Fluorescence X-ray analysis system
X-ray diffraction system (fig.2)
- 4-circle diffractometer (X-ray diffraction, X-ray reflectivity, and Garzing incidence X-ray scattering)
- NaI (Tl), YAP (Ce) scintillation counter, CCD camera
  
  fig.2. X-ray diffraction system
Microbeam experiment system (fig.3)
- Focusing mirrors in a Kirkpatrick-Baez geometry
- Sample stage with two-dimensionally scanning motion and rotation
- Imaging plate for micro-diffraction, SDD for micro-XRF
  
  fig.3. Microbeam experiment system
XMCD experiment system
- Diamond phase plates in optics hutch
- Sample stage with magnets