BL47XU Sample data 2
問い合わせ番号
INS-0000001382
Figures (a) and (b) show intensity profiles of focal prove of X-ray microbeam in vertical direction and horizontal direction, respectively. X-ray energy; 8 keV. Focusing device; Fresnel zone plate (NTT-AT), material; Ta, thickness; 1 µm, outermost zone width; 250 nm.
Figure (c) shows a scanning X-ray microscope image of a Ta test pattern (scan pitch 1 µm), and its finer scan image (scan pitch 62.5 nm) is shown in (d). Image of 0.2 mm space is clearly resolved.
- (a)
(b)
(c) (d)
最終変更日