SPring-8, the large synchrotron radiation facility

Inquiry number

INS-0000001382

Figures (a) and (b) show intensity profiles of focal prove of X-ray microbeam in vertical direction and horizontal direction, respectively. X-ray energy; 8 keV. Focusing device; Fresnel zone plate (NTT-AT), material; Ta, thickness; 1 µm, outermost zone width; 250 nm.
  Figure (c) shows a scanning X-ray microscope image of a Ta test pattern (scan pitch 1 µm), and its finer scan image (scan pitch 62.5 nm) is shown in (d). Image of 0.2 mm space is clearly resolved.

(a)

(b)

(c)  (d)