High-resolution x-ray imaging microtomography
Inquiry number
SOL-0000000933
Beamline
BL47XU (Micro-CT)
Scientific keywords
| A. Sample category | inorganic material, organic material, biology, medicine, research on method, instrumentation |
|---|---|
| B. Sample category (detail) | metal, alloy, semiconductor, insulator, ceramics, amorphous, glass, organic material, macromolecule, biology (in vitro), organism, cell, biological material, biomolecule, noncrystal, pharmaceuticals, environmental material |
| C. Technique | absorption and its secondary process |
| D. Technique (detail) | |
| E. Particular condition | 3D imaging (cf. CT), X-ray microscopy |
| F. Photon energy | X-ray (4-40 keV) |
| G. Target information | morphology |
Industrial keywords
| level 1---Application area | Semiconductor, storage device, cell (battery), mechanics, construction, environment, Pharmaceuticals, industrial material |
|---|---|
| level 2---Target | silicon semiconductor, compound semiconductor, process analytical technology (PAT), fiber, Concrete |
| level 3---Target (detail) | wire, electric rod, drug, tablet |
| level 4---Obtainable information | density, crack, crevice, structure, molphology |
| level 5---Technique | imaging |
Classification
M60.20 X-ray CT
Body text
X-ray imaging microtomography is a high spatial resolution CT system. Using this technique, one can measure a three-dimensional image of sample with a spatial resolution better than 1 micrometer that has been impossible with conventional CT technique. In this system, x-ray image is enlarged with a lens for x-rays (called as Fresnel zone plate) like as visible light microscope. Diameter of samples with smaller than 100 micron can be measured with this technique.
The figure shows three-dimensional CT images measured for a fossil of diatom. These data reveal the fact that fine structure with smaller than 1 micrometer are clearly observed.
Figure: Three-dimensional CT images of a fossil of diatom. left: whole image, right: inner structure shown by cropping a part of sample by data processing.
[ A. Takeuchi, K. Uesugi, H. Takano and Y. Suzuki, Review of Scientific Instruments 73, 4246-4249 (2002), Fig. 5,
©2002 American Institute of Physics ]
Source of the figure
Original paper/Journal article
Journal title
Rev. Sci. Instrum 73, 4246 (2002)
Figure No.
5
Technique
In this experiment, in order to achieve high spatial resolution, x-ray image is enlarged with a lens for x-rays (called as Fresnel zone plate) like as visible light microscope. That will enable the three-dimensional imaging for 100 nm order structures.
Schematic diagram of x-ray imaging microtomography setup.
Source of the figure
Private communication/others
Description
自作
Required time for experimental setup
2 day(s)
Instruments
| Instrument | Purpose | Performance |
|---|---|---|
| Fresnel zone plate | enlarged imaging of x-ray | 100 micron field of view |
| Beam monitor 2 | optical alignment, data acquisition | 4.3 micron pixel size |
| high-accuracy rotation stage | sample rotation | smaller than 0.2 micron wobbring accuracy |
References
| Document name |
|---|
| A. Takeuchi et. al., Rev. Sci. Instrum., 73, 4246-4249 (2002). |
Related experimental techniques
X-ray CT
Questionnaire
The measurement was possible only in SPring-8. Impossible or very difficult in other facilities.
This solution is an application of a main instrument of the beamline.
Ease of measurement
Middle
Ease of analysis
Middle
How many shifts were needed for taking whole data in the figure?
Less than one shift