ナビゲーション


BL16B2 OUTLINE

問い合わせ番号

INS-0000000384

ABSTRACT

  BL16B2 is a bending-magnet beamline, comprising an optics hutch and an experimental hutch. The optics hutch houses a double-crystal monochromator, slits, and mirror, while the experimental hutch is equipped with a high-throughput X-ray topography system. This topography system features a sample stage capable of accommodating 300 mm diameter wafers, an XY stage for in-plane scanning of ±100 mm, and two DIFRAS detectors, enabling the acquisition of images with quality equal to or better than nuclear emulsions, all without development.

AREA OF RESEARCH

  • Semiconductor and electronic material, Crystal growth

KEYWORDS

  • Scientific field
    X-ray topography, Single crystal, Lattice defect, Dislocation
  • Equipment
    DIFRAS detector, Diffractometer

SOURCE AND OPTICS

  • X-rays at sample

    Energy range 7 ∼ 37 keV (Si111)
    Energy resolution ΔE/E ∼ 10-4
    Photon flux ∼ 1010 photons/s
    Maximum beam size 50 mm(H) × 5 mm(V)

EXPERIMENTAL STATIONS

High-throughput X-ray topography system

PUBLICATION SEARCH

* Sorry, Some parts of results are displayed using Japanese characters.

BL16B2 PUBLICATION SEARCH

CONTACT INFORMATION


Kentaro KAJIWARA
SPring-8 / JASRI
1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148 Japan
Phone: +81-50-3496-9195
e-mail: kajiwaraatspring8.or.jp

最終変更日
カレンダー