BL16B2 OUTLINE
Inquiry number
INS-0000000384
ABSTRACT
BL16B2 is a bending-magnet beamline, comprising an optics hutch and an experimental hutch. The optics hutch houses a double-crystal monochromator, slits, and mirror, while the experimental hutch is equipped with a high-throughput X-ray topography system. This topography system features a sample stage capable of accommodating 300 mm diameter wafers, an XY stage for in-plane scanning of ±100 mm, and two DIFRAS detectors, enabling the acquisition of images with quality equal to or better than nuclear emulsions, all without development.
AREA OF RESEARCH
- Semiconductor and electronic material, Crystal growth
KEYWORDS
- Scientific field
X-ray topography, Single crystal, Lattice defect, Dislocation - Equipment
DIFRAS detector, Diffractometer
SOURCE AND OPTICS
- X-rays at sample
Energy range 7 ∼ 37 keV (Si111) Energy resolution ΔE/E ∼ 10-4 Photon flux ∼ 1010 photons/s Maximum beam size 50 mm(H) × 5 mm(V)
EXPERIMENTAL STATIONS
High-throughput X-ray topography system
PUBLICATION SEARCH
* Sorry, Some parts of results are displayed using Japanese characters.
CONTACT INFORMATION
Kentaro KAJIWARA
SPring-8 / JASRI
1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148 Japan
Phone: +81-50-3496-9195
e-mail: kajiwara
spring8.or.jp