問い合わせ番号

INS-0000000356

Multi-axis diffractometer

  The Huber multi-axis diffractometer installed BL19B2 is composed of conventional four circle goniometer (χ, φ, ω, 2θ) and additional four axes (2θz, θz, ωa, 2θa) (Fig.1). The diffractometer is controlled by SPEC and GUI program. This diffractometer is being tuned for residual stress measurement, structural analysis of thin film, surface, and interface. The Eulerian cradle with a gap within χ-circle is adopted to cover wide scattering angle from -45° to 160° without blind region for residual stress measurement. Precise linear X, Y, and Z stages (70 mm × 70 mm × 25 mm) on φ axis enable to observe three-dimensional residual stress profiles of bulky sample. It is expected that residual stress in inner region of bulky sample could be observed with using high energy X-rays. Blades of slits made of Ta can eliminate high energy X-rays less than 100 keV. The ωa and 2θa axes are equipped to use an analyzer crystal. The two additional axes ωz and 2θz are very useful to control glancing angle and take off angle of X-rays to sample surface. Soller Slits were installed in order to detect efficiently the signal from the wide foot print on the sample surface in glancing-incidence X-ray scattering measurements on thin film and surface. CTR and X-ray reflectmetry are also available.

Fig.1. Multi-axis diffractometer