SPring-8, the large synchrotron radiation facility

Skip to content
» JAPANESE
Personal tools
 

Residual stress of TiCN film

Inquiry number

SOL-0000000949

Beamline

BL19B2 (X-ray Diffraction and Scattering II)

Scientific keywords

A. Sample category inorganic material
B. Sample category (detail) metal, alloy, insulator, ceramics
C. Technique X-ray diffraction
D. Technique (detail) wide angle scattering
E. Particular condition room temperature
F. Photon energy X-ray (4-40 keV)
G. Target information dislocation, strain

Industrial keywords

level 1---Application area mechanics, industrial material
level 2---Target
level 3---Target (detail) film, lubricant
level 4---Obtainable information d-spacing (lattice parameter), residual stress
level 5---Technique diffraction

Classification

A80.20 metal ・material, A80.30 inorganic material, M10.80 stress strain

Body text

In this solution, X-ray diffraction was applied to ceramic coating film to analyze depth profile of residual stress in the film. By controlling incident and take-off angle of X-rays to the sample surface,penetration depth of X-ray is tuned. These data reveal the fact that residual stress is monotonically increased from the film surface to the interface between the substrate and the film.

Depth profile of residual stress in TiCN coating film

Source of the figure

Private communication/others

Description

三菱マテリアル 土屋氏提供

Technique

X-ray residual stress measurement is performed by observing dependence of scattering angle on sample orientation to incident X-ray. In this solution, depth profile of residual stress in TiCN film were obtained.

Source of the figure

No figure

Required time for experimental setup

1 shift(s)

Instruments

Instrument Purpose Performance
Multi-axis diffractometer diffraction 4axes and 2axes

References

Document name
S.Tsuchiya et.al., Transactions of the Materials Research Society of Japan 29、425(2004)

Related experimental techniques

Questionnaire

This solution is an application of a main instrument of the beamline.

Ease of measurement

Middle

Ease of analysis

With a great skill

How many shifts were needed for taking whole data in the figure?

Four-nine shifts

Last modified 2022-05-06 15:31