Residual stress of TiCN film
Inquiry number
SOL-0000000949
Beamline
BL19B2 (X-ray Diffraction and Scattering II)
Scientific keywords
| A. Sample category | inorganic material |
|---|---|
| B. Sample category (detail) | metal, alloy, insulator, ceramics |
| C. Technique | X-ray diffraction |
| D. Technique (detail) | wide angle scattering |
| E. Particular condition | room temperature |
| F. Photon energy | X-ray (4-40 keV) |
| G. Target information | dislocation, strain |
Industrial keywords
| level 1---Application area | mechanics, industrial material |
|---|---|
| level 2---Target | |
| level 3---Target (detail) | film, lubricant |
| level 4---Obtainable information | d-spacing (lattice parameter), residual stress |
| level 5---Technique | diffraction |
Classification
A80.20 metal ・material, A80.30 inorganic material, M10.80 stress strain
Body text
In this solution, X-ray diffraction was applied to ceramic coating film to analyze depth profile of residual stress in the film. By controlling incident and take-off angle of X-rays to the sample surface,penetration depth of X-ray is tuned. These data reveal the fact that residual stress is monotonically increased from the film surface to the interface between the substrate and the film.
Depth profile of residual stress in TiCN coating film
Source of the figure
Private communication/others
Description
三菱マテリアル 土屋氏提供
Technique
X-ray residual stress measurement is performed by observing dependence of scattering angle on sample orientation to incident X-ray. In this solution, depth profile of residual stress in TiCN film were obtained.
Source of the figure
No figure
Required time for experimental setup
1 shift(s)
Instruments
| Instrument | Purpose | Performance |
|---|---|---|
| Multi-axis diffractometer | diffraction | 4axes and 2axes |
References
| Document name |
|---|
| S.Tsuchiya et.al., Transactions of the Materials Research Society of Japan 29、425(2004) |
Related experimental techniques
Questionnaire
This solution is an application of a main instrument of the beamline.
Ease of measurement
Middle
Ease of analysis
With a great skill
How many shifts were needed for taking whole data in the figure?
Four-nine shifts