RDF of In2O3 film
Inquiry number
SOL-0000000950
Beamline
BL19B2 (X-ray Diffraction and Scattering II)
Scientific keywords
| A. Sample category | inorganic material |
|---|---|
| B. Sample category (detail) | ferroelectric material, insulator, ceramics |
| C. Technique | X-ray diffraction |
| D. Technique (detail) | grazing incidence X-ray diffraction/scattering |
| E. Particular condition | room temperature |
| F. Photon energy | X-ray (4-40 keV) |
| G. Target information | structure analysis |
Industrial keywords
| level 1---Application area | electric component, display, industrial material |
|---|---|
| level 2---Target | LCD, PDP、FED |
| level 3---Target (detail) | electric rod |
| level 4---Obtainable information | structure of non-crystalline material |
| level 5---Technique | GIXS |
Classification
A80.10 electronics, A80.30 inorganic material, M10.30 surface・interface diffraction
Body text
Grazing incidence X-ray scattering is performed by observing scattered X-ray profiles reflecting atomic arrangement of thin film on substrate. In this solution, radial distribution function of amorphous In2O3 film on substrate were obtained.
Radial distribution function of In2O3 film
Source of the figure
Private communication/others
Description
出光興産 島根氏提供
Technique
Grazing incidence X-ray scattering is performed by observing scattered X-ray profiles reflecting atomic arrangement of thin film on substrate. In this solution, radial distribution function of amorphous In2O3 film on substrate were obtained.
Source of the figure
No figure
Required time for experimental setup
1 shift(s)
Instruments
| Instrument | Purpose | Performance |
|---|---|---|
| Multi-axis diffractometer | diffraction | 4axes and 2axes |
References
| Document name |
|---|
| I. Hirosawa et.al.,Transactions of the Materials Research Society of Japan, 30 (2005) 221-224 |
Related experimental techniques
Questionnaire
The measurement was possible only in SPring-8. Impossible or very difficult in other facilities.
This solution is an application of a main instrument of the beamline.
Ease of measurement
Middle
Ease of analysis
Middle
How many shifts were needed for taking whole data in the figure?
Two-three shifts