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X-ray reflectmetory of lubricant

  • For beginners

Inquiry number

SOL-0000000878

Beamline

BL19B2 (X-ray Diffraction and Scattering II)

Scientific keywords

A. Sample category organic material
B. Sample category (detail) macromolecule, membrane
C. Technique X-ray elastic scattering
D. Technique (detail) reflection, refraction
E. Particular condition room temperature
F. Photon energy X-ray (4-40 keV)
G. Target information structure analysis

Industrial keywords

level 1---Application area storage device, Chemical product
level 2---Target HD,MO
level 3---Target (detail) film, lubricant
level 4---Obtainable information density, film thickness
level 5---Technique reflectometry

Classification

A80.10 electronics, M10.50 reflectometry

Body text

In this solution, X-ray reflectometry was applied to lubricant to analyze its film thickness. X-ray reflectometry is powerful technique to characterize very thin film. These data reveal the fact that the thickness of the lubricant is determined to be 0.7 nm.

Observed reflectivities of lubricant on Si substrate (blue curve) and Si substrate (brown curve)

Source of the figure

Private communication/others

Description

広沢作成(試料は松村石油 坂根氏)

Technique

X-ray reflectometry is performed by observing X-ray reflectivity from sample. X-ray reflectivity is affected by thickness of films, electron densities of films and substrate, and roughness at surface and interfaces. In this solution, thicknesses and electron densities of coated lubricant, and native oxide layer of Si substrate were obtained.

Source of the figure

No figure

Required time for experimental setup

1 shift(s)

Instruments

Instrument Purpose Performance
Multi-axis diffractometer diffraction 4axes and 2axes

References

Document name
S. Pershan&A. Nielsen., Phys. Rev. Lett. 52,759 (1984)

Related experimental techniques

Questionnaire

This solution is an application of a main instrument of the beamline.

Ease of measurement

Easy

Ease of analysis

Middle

How many shifts were needed for taking whole data in the figure?

Less than one shift

Last modified 2022-05-06 15:31