SPring-8, the large synchrotron radiation facility

Inquiry number

SOL-0000000986

Beamline

BL29XU (RIKEN Coherent X-ray Optics)

Scientific keywords

A. Sample category	inorganic material
B. Sample category (detail)	crystal
C. Technique	X-ray diffraction
D. Technique (detail)
E. Particular condition	2D imaging, room temperature
F. Photon energy	X-ray (4-40 keV)
G. Target information	dislocation, strain

Industrial keywords

level 1---Application area	Semiconductor
level 2---Target	silicon semiconductor, compound semiconductor
level 3---Target (detail)	SOI, substrate
level 4---Obtainable information	d-spacing (lattice parameter), residual stress, structure
level 5---Technique	diffraction

Classification

A80.30 inorganic material, M10.10 single crystal diffraction

Body text

X-ray topography is a method to visualize strain field due to defects in crystals. Such an information makes it possible to judge the quality of crystals, and to determine the way of crystal growth to reduce the defects. The plane-wave topography, which uses plane wave as incidence, is a special technique to investigate minute strain, so that it is useful for nearly perfect crystals. The 1-km beamline at SPring-8 provides wide beam (~30 mm) for large area plane-wave topography, in spite that the source is an undulator.

The following figure is an example of the plane-wave topography measured with a synthetic type IIa diamond. The black parts were the strain fields due to defects, such as stacking faults, outcrops of dislocations, and impurities.

Fig. Plane-wave topograph of a synthetic type IIa diamond.

[ K. Tamasaku, T. Ueda, D. Miwa and T. Ishikawa, Journal of Physics D 38, A61-A66 (2005), Fig. 2(b),
©2005 Institute of Physics and IOP Publishing, Ltd. ]

Source of the figure

Original paper/Journal article

Journal title

K. Tamasaku et al, J. Phys. D: Appl. Phys. 38, A61 (2005)

Figure No.

Fig.2(b)

Technique

Prepare a collimator crystal, which has a similar d-spacing to the reflecting netplane of the sample.
Set the collimator and the sample non-dispersively.
Take pictures by a CCD-based beam monitor.

Source of the figure

No figure

Required time for experimental setup

hour(s)

Instruments

Instrument	Purpose	Performance
goniometers	to align the collimator and the samples	1/720000 deg. angular resolution
beam monitor	to take the beam images	6 or 12 micron pixel size

References

Document name
T. Ishikawa, J. Cryst. Growth 103, 131 (1990).
K.Tamasaku, T. Ueda, D. Miwa, and T. Ishikawa, J. Phys. D: Appl. Phys. 38, A61 (2005).

Related experimental techniques

Cathode luminescence

Questionnaire

The measurement was possible only in SPring-8. Impossible or very difficult in other facilities.
This solution is an application of a main instrument of the beamline.

Ease of measurement

Middle

Ease of analysis

Middle

How many shifts were needed for taking whole data in the figure?

Two-three shifts