SPring-8, the large synchrotron radiation facility

Inquiry number

INS-0000001484

ABSTRACT

BL46XU is an industrial applications beamline with an undulator light source and used for promoting utilization of synchrotron radiation by industry. A multi-axis X-ray diffractometer and hard X-ray photoemission spectroscopy device has been installed in the experimental hutch. The XPS device can be replaced by a small x-ray diffractometer for structure evaluation of thin films in a simple exchange procedure within the experimental hutch.
Using the multi-axis X-ray diffractometer (HUBER 8-axis diffractometer), you can carry out not only general X-ray diffraction/scattering measurement but also grazing-incident X-ray diffraction and X-ray reflectivity measurement to characterize structure of thin films, surface, and interface or residual strain measurement by X-ray diffraction. There are various utilities in the peripheral devices to meet a variety of analytical needs from users. For example, a two-dimensional pixel detector allows you to perform in-situ time-resolved X-ray diffraction experiments.
The hard X-ray spectroscopy system utilizes hard X-ray (6-8keV) from high brilliance synchrotron radiation of SPring-8 to excite high-energy photoelectrons with a large escape depth, achieving probing depth of 20nm that is sufficient for the electronic state analysis deep inside the material.
The small diffractometer RIGAKU ATX-G can be used for structural characterization of thin films by grazing-incident X-ray diffraction.
 

AREA OF RESEARCH 

• Structural characterization of thin film by X-ray diffraction and X-ray reflectivity measurement
• Residual stress measurement
• Time resolved X-ray diffraction
• Hard X-ray Photoemission Spectroscopy

KEYWORDS

• Scientific field
  X-ray diffraction/scattering, thin film, surface, interface, residual strain, hard X-ray photoemission spectroscopy
• Equipment
  8-axis X-ray diffractometer (HUBER), hard X-ray photoemission spectroscopy system (R-4000, VG-SCIENTA), X-ray diffractometer for structure characterization of thin films (ATX-G, RIGAKU)

SOURCE AND OPTICS

Light source is a standard in-vacuum undulator in SPring-8 and optics adopts a Si (111) direct water-cooled inclined double-crystal monochromator. The tunable energy range is 6-35 KeV. Two Rh-evaporated mirrors (70cm length, reflection direction is horizontal) are placed in the most downstream part of the optics hutch to eliminate harmonics. The mirrors have curvature for horizontal light focus. A Si (111) channel-cut monochromator is placed between the monochromator and the mirrors to get incident X-ray with fine energy resolution for hard X-ray photoemission spectroscopy.

• X-rays at Sample

   

  Energy Range	6 ~ 35 keV
  Energy Resolution	ΔE/E ~10-4
  Photon Flux	~1013photon/s
  Beam Size	<0.5(H) × 0.5(V)

EXPERIMENTAL STATIONS 

• Multi-axis diffractometer
• Hard X-ray photoemission spectroscopy system
• X-ray diffractometer for structure characterization of thin films

PUBLICATION SEARCH

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CONTACT INFORMATION

Please note that each e-mail address is followed by "@spring8.or.jp."

Tomoyuki Koganezawa
SPring-8 / JASRI
1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198
Phone : +81-(0)791-58-0832
Fax : +81-(0)791-58-0830
e-mail : koganeza

Masugu Sato
SPring-8 / JASRI
1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198
Phone : +81-(0)791-58-0832
Fax : +81-(0)791-58-0830
e-mail : msato